Cleanroom refers to the removal of particulates, harmful air, bacteria, and other contaminants in the air within a certain range of space, and the indoor temperature, cleanliness, indoor pressure, airflow velocity and airflow distribution, noise and vibration, and static electricity control. Within a certain range of requirements, a specially designed room is given. That is, no matter how the external air conditions change, the interior of the room can all have the properties of maintaining the previously set requirements such as cleanliness, temperature, humidity and pressure.
The main function of a clean room is to control the cleanliness, temperature, and humidity of the atmosphere that products (such as silicon chips) touch, so that the product can be produced and manufactured in a good environment. This space is called a clean room. According to international practice, the level of dust-free purification is mainly regulated by the number of particles per cubic meter of air that is larger than the partitioning standard. In other words, the so-called dust-free is not 100% without a little dust, but it is controlled in a very small amount of units. Of course, the dust-standard particles in this standard are already small relative to our common dust, but for optical construction, even a little bit of dust has a very large negative impact, so in the production of optical construction products No dust is an inevitable requirement.
The number of fine dust particles with a diameter of less than 0.3 μm per cubic metre is controlled below 3,500 to reach the Class A of the international dust-free standard. At present, the dust-free standard applied to chip-level production and processing requires more dust than A-grade. Such high standards are mainly applied to the production of some higher-level chips. 0.5uM and below the number of fine dust is strictly controlled within 1,000 per cubic meter, which is also known as the industry 1K level.